Microelectronic Test Structures for CMOS Technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

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Bibliografiske detaljer
Auteurs principaux: Bhushan, Manjul, Ketchen, Mark B. (Auteur)
Format: Livre numérique
Sprog:Anglais
Udgivet: New York, NY : Springer New York 2011.
Cham : Springer Nature
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Edition sous un autre format:• Microelectronic Test Structures for CMOS Technology, Texte imprimé, 9781441993762
• Microelectronic Test Structures for CMOS Technology, Texte imprimé, 9781441993786
• Microelectronic Test Structures for CMOS Technology, Texte imprimé, 9781489990556
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Summary:Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance and characteristics of MOSFETs and other circuit elements.  Detailed examples are presented throughout, many of which are equally applicable to other microelectronic technologies as well. The authors overarching goal is to provide students and technology practitioners alike a practical guide to the disciplined design and use of test structures that give unambiguous information on the parametrics and performance of digital CMOS technology.
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ISBN:9781441993779
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