Introduction to Microsystem Design
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important...
Gardado en:
| Autor Principal: | |
|---|---|
| Formato: | Livre numérique |
| Idioma: | Anglais |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
2011.
Cham : Springer Nature |
| Series: | RWTHedition
1 |
| Acceso en liña: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Introduction to Microsystem Design, Texte imprimé, 9783642194887 • Introduction to Microsystem Design, Texte imprimé, 9783642268526 • Introduction to Microsystem Design, Texte imprimé, 9783642194900 |
Table des matières:
- Preface
- Notations and symbols
- Introduction
- Scaling Laws
- Elastic deformations
- Thin Films
- Conductor Paths
- Membranes
- Strain gauges on membranes
- Beams
- Vibrations
- Capillaries
- Capacitive forces
- Piezoelectric effect
- Thermal actuators
- Micro optics
- Diffusion
- Micro valves
- Micro pumps
- Micro dosing
- Analogies between physical domains
- Mechanical devices for electronics
- Pressure sensors
- Flow sensors
- Inertial sensors.