Dynamics of Microelectromechanical Systems
This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of pro...
Enregistré dans:
| Auteur principal: | |
|---|---|
| Format: | Livre numérique |
| Langue: | Anglais |
| Publié: |
New York, NY :
Springer US
[20..].
Cham : Springer Nature |
| Édition: | 1st ed. 2007. |
| Collection: | Microsystems
17 |
| Accès en ligne: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Dynamics of Microelectromechanical Systems, Texte imprimé, 9780387368009 • Dynamics of Microelectromechanical Systems, Texte imprimé, 9781441942258 • Complex fluids, proceedings of the XII Sitges conference, Sitges, Barcelona, Spain, 1-5 June 1992, ed. Luis Garrido, Berlin, Springer-verlag, 1993, 1 vol. (XIII-413 p), Lecture notes in physics, 3-540-56396-2 |
Table des matières:
- Microcantilevers and Microbridges: Bending and Torsion Resonant Frequencies Micromechanical Systems: Modal Analysis Energy Losses in MEMS and Equivalent Viscous Damping Frequency and Time Response of MEMS