Dynamics of Microelectromechanical Systems

This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of pro...

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Detaylı Bibliyografya
Yazar: Lobontiu, Nicolae, 19..-
Materyal Türü: Livre numérique
Dil:Anglais
Baskı/Yayın Bilgisi: New York, NY : Springer US [20..].
Cham : Springer Nature
Edisyon:1st ed. 2007.
Seri Bilgileri:Microsystems 17
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Not: Archives Springer e-books (Licence nationale)
Archives Springer e-books (Licence nationale)
Autres localisations: Voir dans le Sudoc
Edition sous un autre format:• Dynamics of Microelectromechanical Systems, Texte imprimé, 9780387368009
• Dynamics of Microelectromechanical Systems, Texte imprimé, 9781441942258
• Complex fluids, proceedings of the XII Sitges conference, Sitges, Barcelona, Spain, 1-5 June 1992, ed. Luis Garrido, Berlin, Springer-verlag, 1993, 1 vol. (XIII-413 p), Lecture notes in physics, 3-540-56396-2
Diğer Bilgiler
Özet:This work presents a systematic view of the dynamics of MEMS (microelectromechanical systems), microstructures, and their responses. The focus is on the mecahnical/structural micro domain and the compliant nature of mechanical transmission. Features of this work include: An in-depth treatment of problems that involve reliable modeling, analysis and design, Analytical models with correct dependences on service dimensions, Cantilever based systems for nanofabrication researchers and designers, and Dynamics of complex spring and beam microsystems. Although not designed for a specific course, this material could be used as a text at the upper-undergraduate/graduate level, and, as such, it contains numerous fully-solved examples as well as many end-of-the-chapter proposed problems. This is a follow up to the book, Mechanics of Microelectromechanical Systems, by Lobontiu and Garcia (Springer 2004), but the material in this new book is self-contained. Dynamics of Microelectromechanical Systems is a timely text and reference for microstructural engineers, microengineers, and MEMS specialists
Diğer Bilgileri:Archives Springer e-books (Licence nationale)
Archives Springer e-books (Licence nationale)
ISBN:9780387681955
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Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017