Silicon Devices and Process Integration : Deep Submicron and Nano-Scale Technologies
Silicon Devices and Process Integration is compiled from industrial and academic lecture notes and reflects years of experience in the development of silicon devices. It is prepared specifically for engineers and scientists in semiconductor research, development and manufacturing. It is also suitabl...
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| Auteur principal: | |
|---|---|
| Format: | Livre numérique |
| Langue: | Anglais |
| Publié: |
New York, NY :
Springer US
2009.
Cham : Springer Nature |
| Accès en ligne: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Silicon Devices and Process Integration, Texte imprimé, 9780387367989 • Phonon scattering in condensed matter VII, proceedings of the seventh International Conference, Cornell University, Ithaca, New York, August 3-7, 1992, ed. M. Meissner, R.O. Pohl, eds, Berlin, Springer, 1993, 1 vol. (XXV-534 p.), Springer series in solid-state sciences, 3-540-56395-4 • Silicon Devices and Process Integration, Texte imprimé, 9781441942241 |