Silver Metallization : Stability and Reliability

Silver has the lowest resistivity of all metals, which makes it an attractive interconnect material for higher current densities and faster switching speeds in integrated circuits. Over the past ten years, extensive research has been conducted to address the thermal and electrical stability, as well...

وصف كامل

محفوظ في:
التفاصيل البيبلوغرافية
المؤلفون الرئيسيون: Adams, Daniel, Alford, Terry L. (مؤلف), Mayer, James W., 1930- (مؤلف)
التنسيق: Livre numérique
اللغة:Anglais
منشور في: London : Springer London 2008.
Cham : Springer Nature
سلاسل:Engineering Materials and Processes
الوصول للمادة أونلاين:Accès sur la plateforme de l'éditeur
Accès sur la plateforme Istex
Accès Université d'Orléans
Accès INSA CVL
ملاحظة: Archives Springer e-books (Licence nationale)
Archives Springer e-books (Licence nationale)
Autres localisations: Voir dans le Sudoc
Edition sous un autre format:• Silver Metallization, Texte imprimé, 9781849967051
• Silver Metallization, Texte imprimé, 9781848006843
• Silver metallization, stability and reliability, Daniel Adams, Terry L. Alford, and James W. Mayer, London, Springer, 2008, 1 vol. (xi, 123 p.), Engineering materials and processes, 978-1-84800-026-1
جدول المحتويات:
  • Silver Thin Film Characterization
  • Diffusion Barriers and Self-encapsulation
  • Thermal Stability
  • Silver Electromigration Resistance
  • Integration Issues
  • Summary.