Gettering defects in semiconductors
Gettering Defects in Semiconductors fulfills three basic purposes: to systematize the experience and research in exploiting various gettering techniques in microelectronics and nanoelectronics; to identify new directions in research, particularly to enhance the perspective of professionals and young...
Đã lưu trong:
| Những tác giả chính: | , |
|---|---|
| Định dạng: | Livre numérique |
| Ngôn ngữ: | Anglais |
| Được phát hành: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
[20..].
Cham : Springer Nature |
| Phiên bản: | 1st ed. 2005. |
| Loạt: | Springer Series in Advanced Microelectronics
19 |
| Truy cập trực tuyến: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Chú thích: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Gettering defects in semiconductors, V.A. Perevostchikov, V.D. Skoupov, Berlin, Springer, 2005, 1 vol. (XV-386 p.), Springer series in advanced microelectronics, 3-540-26244-X • Gettering Defects in Semiconductors, Texte imprimé, 9783540811954 • Gettering Defects in Semiconductors, Texte imprimé, 9783642065705 • Gettering defects in semiconductors, V.A. Perevostchikov, V.D. Skoupov, Berlin, Springer, 2005, 1 vol. (XV-386 p.), Springer series in advanced microelectronics, 3-540-26244-X |
Mục lục:
- Basic technological processes and defect formation in the components of device structures Effects of defects on electrophysical and functional parameters in semiconducting structures and devices Techniques for high-temperature gettering Physical foundations for low-temperature gettering techniques