Nanofabrication : Techniques and Principles
Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with n...
Enregistré dans:
| Autres auteurs: | , |
|---|---|
| Format: | Livre numérique |
| Langue: | Anglais |
| Publié: |
Vienna :
Springer Vienna
2012.
Cham : Springer Nature |
| Accès en ligne: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Nanofabrication, Texte imprimé, 9783709104231 |
Table des matières:
- 1 Introduction Directions in Nanofabrication 2 Nanolithography Fundamentals of Electron Beam Exposure and Development Simulation of Electron Beam Exposure and Resist Processing for Nano-Patterning Helium Ion Lithography Nanoimprint Technologies 3 Deposition at the Nanoscale Atomic Layer Deposition for Nanotechnology Surface Functionalization in the Nanoscale Domain Nanostructures Based on Self-Assembly of Block Copolymers Epitaxial Growth of Metals on Semiconductors Via Electrodeposition 4 Nanoscale Etching and Patterning Chemical Mechanical Polish for Nanotechnology Deposition, Milling, and Etching with a Focused Helium Ion Beam Laser Nanopatterning Templating and Pattern Transfer Using Anodized Nanoporous Alumina/Titania.