Electron-beam interactions with solids : application of the Monte Carlo method to electron scattering problems
The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auge...
Bewaard in:
| Hoofdauteur: | |
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| Formaat: | Livre numérique |
| Taal: | Anglais |
| Gepubliceerd in: |
Berlin [etc.] :
Springer
[20..].
Cham : Springer Nature |
| Reeks: | Springer tracts in modern physics
186 |
| Onderwerpen: | |
| Online toegang: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Opmerking: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Electron-beam interactions with solids, application of the Monte Carlo method to electron scattering problems, Maurizio Dapor, Berlin, Springer, 2003, 1 vol. (103 p.), Springer tracts in modern physics, 3-540-00652-4 • Electron-Beam Interactions with Solids, Texte imprimé, 9783642056239 • Electron-Beam Interactions with Solids, Texte imprimé, 9783662146101 |
| Samenvatting: | The interaction of electron beams with solid targets has been studied since the early part of the last century. Present interest is spurred on by the fundamental role played by the electron-solid interaction in - among other areas - scanning electron microscopy, electron-probe microanalysis and Auger electron spectroscopy. This book aims to investigate selected aspects of the interaction of electrons with matter (backscattering coefficient for bulk targets, absorption, backscattering and transmission for supported and unsupported thin films, implantation profiles, secondary electron emission and so on); to study the probabilistic laws of interaction of the individual electrons with the atoms (elastic and inelastic cross sections); to introduce the Monte Carlo method and its use for computing the macroscopic characteristics of the interaction processes. Each chapter compares theory, simulations and experimental data. |
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| Beschrijving item: | Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| ISBN: | 9783540365075 (PDF) |
| ISSN: | 1615-0430 |
| Toegang: | Accès en ligne pour les établissements français bénéficiaires des licences nationales Accès soumis à abonnement pour tout autre établissement Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 |