MEMS materials and processes handbook
MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The...
保存先:
| 第一著者: | |
|---|---|
| その他の著者: | |
| フォーマット: | Livre numérique |
| 言語: | Anglais |
| 出版事項: |
New York, NY :
Springer US
[20..].
Cham : Springer Nature |
| 版: | 1st ed. 2011. |
| シリーズ: | MEMS Reference Shelf
1 |
| オンライン･アクセス: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| 注記: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Variante du titre: | The Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied |
| Edition sous un autre format: | • MEMS materials and processes handbook, Reza Ghodssi, Pinyen Lin, editors, New York, Springer, 2011, 1 vol. (xxxv-1187 p.), MEMS reference shelf, 978-0-387-47316-1 • TEX, starting from 1, Michael Doob, Berlin, Springer-Verlag, 1993, 1 vol. (X-114 p.), 3-540-56441-1 |
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| 100 | 1 | |a Ghodssi, Reza. | |
| 240 | 1 | 0 | |a The Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied |
| 245 | 1 | 0 | |a MEMS materials and processes handbook |c edited by Reza Ghodssi, Pinyen Lin. |
| 250 | |a 1st ed. 2011. | ||
| 260 | |a New York, NY : |b Springer US. | ||
| 260 | |a Cham : |b Springer Nature, |c [20..]. | ||
| 490 | 0 | |a MEMS Reference Shelf |v 1 |x 1936-4415 | |
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 505 | 1 | |a Introduction - Reza Ghodssi and Pinyen Lin The MEMS Design Process - Tina Lamers and Beth Pruitt Additive Processes for Semiconductors and Dielectric Materials - Chris Zorman, Robert C. Roberts and Li Chen Additive Processes for Metals - David Arnold, Monika Saumer and Yong Kyu-Yoon Additive Processes for Polymeric Materials - Ellis Meng, Xin Zhang, and William Benard Additive Processes for Piezoelectric Materials - Ronald Polcawich, Jeff Pulskamp, Takashi Mineta, and Yoichi Haga Materials and Processes in Shape-Memory Alloy - Takashi Mineta and Yoichi Haga Dry Etching for Micromachining Applications - Srinivas Tadigadapa and Franz Laermer MEMS Wet-Etch Processes and Procedures - David Burns MEMS Lithography and Micromachining Techniques - Daniel Hines, Nathan Siwak, Lance Mosher and Reza Ghodssi Doping - Alan D. Raisanen Wafer Bonding - Shawn Cunningham and Mario Kupnik MEMS Packaging Materials - Ann Garrison Darrin and Robert Osiander Surface Treatment and Planarization - Pinyen Lin, Roya Maboudian, Carlo Carraro, Fan-Gang Tseng, Pen-Cheng Wang, and Yongqing Lan MEMS Process Integration - Michael Huff, Stephen Bart, and Pinyen Lin. . | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The extensive 'Material Selection Guide' and a 'Material Database' guides the reader through the selection of appropriate materials for the required task at hand. The 'Processes' section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs. The book also: Provides a comprehensive catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMS Discusses specific MEMS fabrication techniques such as additive, subtractive, and lithography/patterning, as well as wafer bonding, doping, surface treatment/preparation, and characterization techniques Provides the reader with a quick check list of the advantage/disadvantage of fabrication MEMS Material and Processes Handbook will be a valuable book for researchers, engineers and students working in MEMS and materials processing. . | ||
| 700 | 1 | |a Lin, Pinyen. |4 pbd | |
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| 776 | 0 | |0 017284015 |t TEX |o starting from 1 |f Michael Doob |c Berlin |n Springer-Verlag |d 1993 |p 1 vol. (X-114 p.) |z 3-540-56441-1 | |
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