MEMS materials and processes handbook
MEMS Materials and Processes Handbook is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on 'Materials' and 'Processes'. The...
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| Auteur principal: | |
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| Autres auteurs: | |
| Format: | Livre numérique |
| Langue: | Anglais |
| Publié: |
New York, NY :
Springer US
[20..].
Cham : Springer Nature |
| Édition: | 1st ed. 2011. |
| Collection: | MEMS Reference Shelf
1 |
| Accès en ligne: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Variante du titre: | The Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied |
| Edition sous un autre format: | • MEMS materials and processes handbook, Reza Ghodssi, Pinyen Lin, editors, New York, Springer, 2011, 1 vol. (xxxv-1187 p.), MEMS reference shelf, 978-0-387-47316-1 • TEX, starting from 1, Michael Doob, Berlin, Springer-Verlag, 1993, 1 vol. (X-114 p.), 3-540-56441-1 |