Design and Manufacturing of Active Microsystems
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The...
محفوظ في:
| المؤلف الرئيسي: | |
|---|---|
| مؤلفون آخرون: | , |
| التنسيق: | Livre numérique |
| اللغة: | Anglais |
| منشور في: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
[20..].
Cham : Springer Nature |
| الطبعة: | 1st ed. 2011. |
| سلاسل: | Microtechnology and MEMS
|
| الوصول للمادة أونلاين: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| ملاحظة: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Design and manufacturing of active microsystems, Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors, Heidelberg, Springer, 2011, 1 vol. (XII-444 p.), Microtechnology and MEMS, 978-3-642-12902-5 • Design and Manufacturing of Active Microsystems, Texte imprimé, 9783642267383 • Design and Manufacturing of Active Microsystems, Texte imprimé, 9783642129049 |
جدول المحتويات:
- 1. Introduction 2. Design and Construction 3. Guiding and Measuring in Active Microsystems 4. Manufacturing and Fabrication 5. Microassembly 6.Industrial Applications