Design and Manufacturing of Active Microsystems
This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The...
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| Autore principale: | |
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| Altri autori: | , |
| Natura: | Livre numérique |
| Lingua: | Anglais |
| Pubblicazione: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
[20..].
Cham : Springer Nature |
| Edizione: | 1st ed. 2011. |
| Serie: | Microtechnology and MEMS
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| Accesso online: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Design and manufacturing of active microsystems, Stephanus Büttgenbach, Arne Burisch, Jürgen Hesselbach, editors, Heidelberg, Springer, 2011, 1 vol. (XII-444 p.), Microtechnology and MEMS, 978-3-642-12902-5 • Design and Manufacturing of Active Microsystems, Texte imprimé, 9783642267383 • Design and Manufacturing of Active Microsystems, Texte imprimé, 9783642129049 |