Lecture Notes on Principles of Plasma Processing :: SCD d'Orléans

Lecture Notes on Principles of Plasma Processing

Lecture Notes on Principles of Plasma Processing

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Bibliografski detalji
Glavni autori:	Chen, Francis F., 1929-, Chang, Jane P. (Autor)
Format:	Livre numérique
Jezik:	Anglais
Izdano:	Cham : Springer International Publishing [20..]. Cham : Springer Nature
Online pristup:	Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL
Bilješka:	Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale)
Autres localisations:	Voir dans le Sudoc
Edition sous un autre format:	• Lecture notes on principles of plasma processing, Francis F. Chen, Jane P. Chang, New York, Kluwer Academic/Plenum Publishers, 2003, IX-208 p., 0-306-47497-2

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