Introduction to focused ion beams : instrumentation, theory, techniques and practice
The focused ion beam (FIB) instrument has experienced an intensive period of maturation since its inception. Numerous new techniques and applications have been brought to fruition, and over the past few years, the FIB has gained acceptance as more than just an expensive sample preparation tool. It h...
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| Další autoři: | , |
|---|---|
| Médium: | Livre numérique |
| Jazyk: | Anglais |
| Vydáno: |
Boston, MA :
Springer US : Imprint: Springer
[20..].
Cham : Springer Nature |
| On-line přístup: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Poznámka: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Introduction to focused ion beams, instrumentation, theory, techniques, and pratice, edited by Lucille A. Giannuzzi,..., Fred A. Stevie,..., New York, Springer Science +Business MEDIA, 2005, 1 vol. (XIV-357p.), 0-387-23116-1 |
Obsah:
- The Focused Ion Beam Instrument Ion - Solid Interactions Focused Ion Beam Gases for Deposition and Enhanced Etch Three-Dimensional Nanofabrication Using Focused Ion Beams Device Edits and Modifications The Uses of Dual Beam FIB in Microelectronic Failure Analysis High Resolution Live Imaging of FIB Milling Processes for Optimum Accuracy FIB for Materials Science Applications - a Review Practical Aspects of FIB Tem Specimen Preparation FIB Lift-Out Specimen Preparation Techniques A FIB Micro-Sampling Technique and a Site Specific TEM Specimen Preparation Method Dual-Beam (FIB-SEM) Systems Focused Ion Beam Secondary Ion Mass Spectrometry (FIB-SIMS) Quantitative Three-Dimensional Analysis Using Focused Ion Beam Microscopy Application of FIB in Combination with Auger Electron Spectroscopy.