Mechanics and physics of precise vacuum mechanisms
In this book the Russian expertise in the field of the design of precise vacuum mechanics is summarized. A wide range of physical applications of mechanism design in electronic, optical-electronic, chemical, and aerospace industries is presented in a comprehensible way. Topics treated include the me...
Guardat en:
| Autors principals: | , , , |
|---|---|
| Format: | Livre numérique |
| Idioma: | Anglais |
| Publicat: |
Dordrecht :
Springer Netherlands : Springer e-books
[20..].
Cham : Springer Nature |
| Col·lecció: | Fluid Mechanics and Its Applications
91 |
| Accés en línia: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Mechanics and Physics of Precise Vacuum Mechanisms, Texte imprimé, 9789048125197 |
Taula de continguts:
- Using Precise Mechanisms in Modern Vacuum Technological Equipment Typical Vacuum Mechanisms Friction in Vacuum Matrix Method of the Design of New Mechanisms Structure Precision of Vacuum Mechanisms Vacuum Mechanisms of Nanoscale Precision Ultrahigh Vacuum Rotary-Motion Feedthroughs Ultrahigh Vacuum Non-Coaxial Linear-Motion Feedthroughs Vacuum Frictionless Mechanisms Based on the Principle of Controlled Elastic Deformation Flow of Microparticles Originating from Mechanisms in Vacuum