Precision motion control : design and implementation
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...
Salvato in:
| Autori principali: | , , |
|---|---|
| Natura: | Livre numérique |
| Lingua: | Anglais |
| Pubblicazione: |
London :
Springer London
2008.
Cham : Springer Nature |
| Serie: | Advances in Industrial Control
|
| Accesso online: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Precision Motion Control, Texte imprimé, 9781848000209 • Precision Motion Control, Texte imprimé, 9781848006812 • Precision motion control, design and implementation, Tan Kok Kiong, Lee Tong Heng, Huang Sunan, Second edition, 2010, London, Springer, 1 vol. (XVI-272 p.), Advances in industrial control, 978-1-84996-704-4 |