BioNanoFluidic MEMS

BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covere...

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Bibliografiske detaljer
Hovedforfatter: Hesketh, Peter J. (Éditeur intellectuel)
Format: Livre numérique
Sprog:Anglais
Udgivet: Boston, MA : Springer US [20..].
Cham : Springer Nature
Serier:MEMS Reference Shelf
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Kommentar: Archives Springer e-books (Licence nationale)
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Edition sous un autre format:• BioNanoFluidic MEMS, Texte imprimé, 9781441942791
• Coding theory and applications, 3rd international colloquium, Toulon, France, November 2-4, 1988, proceedings, G. Cohen, J. Wolfmann (eds.), New York, Springer-Verlag, 1989, 1 vol. (IX-327 p.), Lecture notes in computer science, 3-540-51643-3
• BioNanoFluidic MEMS, Peter J. Hesketh editor, 2008, New York, Springer, 1 vol. (X-295 p.), MEMS Reference shelf, 978-0-387-46281-3
Beskrivelse
Summary:BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes: BioNanoFluidic MEMS connection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration "The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner." STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus.
Emne beskrivelse:Archives Springer e-books (Licence nationale)
Archives Springer e-books (Licence nationale)
ISBN:9780387462837
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