Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integ...
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| Autors principals: | , , |
|---|---|
| Format: | Livre numérique |
| Idioma: | Anglais |
| Publicat: |
New York, NY :
Springer US
[20..].
Cham : Springer Nature |
| Edició: | 1st ed. 2006. |
| Accés en línia: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Micromachined thin-film sensors for SOI-CMOS co-integration, by Dr. J. Laconte,... Prof. D. Flandre,... and Prof. J.P. Raskin,..., Dordrecht, Springer, 2006, 1 vol. (xiii-292 p.), 0-387-28842-2 |
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| 100 | 1 | |a Laconte, Jean. | |
| 245 | 1 | 0 | |a Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration |c by J. Laconte, D. Flandre, J. -P. Raskin. |
| 250 | |a 1st ed. 2006. | ||
| 260 | |a New York, NY : |b Springer US. | ||
| 260 | |a Cham : |b Springer Nature, |c [20..]. | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 505 | 1 | |a Introduction: Context and motivations Introduction: Context and motivations Techniques and materials Silicon bulk micromachining with TMAH Thin dielectric films stress extraction Microsensors Low power microhotplate as basic cell Microheater based flow sensor Gas Sensors on microhotplate SOI-CMOS compatibility validation Conclusions and outlook Conclusions and outlook. | |
| 505 | 0 | |a Introduction: Context and motivations -- Techniques and materials -- Microsensors -- Conclusions and outlook -- Silicon bulk micromachining with TMAH -- Thin dielectric films stress extraction -- Low power microhotplate as basic cell -- Microheater based flow sensor -- Gas Sensors on microhotplate -- SOI-CMOS compatibility validation | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 m-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology | ||
| 700 | 1 | |a Flandre, Denis, |d 19..- |4 aut | |
| 700 | 1 | |a Raskin, Jean-Pierre, |d 1971- |4 aut | |
| 776 | 0 | |0 198387660 |t Micromachined thin-film sensors for SOI-CMOS co-integration |f by Dr. J. Laconte,... Prof. D. Flandre,... and Prof. J.P. Raskin,... |c Dordrecht |n Springer |d 2006 |p 1 vol. (xiii-292 p.) |z 0-387-28842-2 | |
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