Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integ...
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| Autori principali: | , , |
|---|---|
| Natura: | Livre numérique |
| Lingua: | Anglais |
| Pubblicazione: |
New York, NY :
Springer US
[20..].
Cham : Springer Nature |
| Edizione: | 1st ed. 2006. |
| Accesso online: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Micromachined thin-film sensors for SOI-CMOS co-integration, by Dr. J. Laconte,... Prof. D. Flandre,... and Prof. J.P. Raskin,..., Dordrecht, Springer, 2006, 1 vol. (xiii-292 p.), 0-387-28842-2 |