Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...
Uloženo v:
| Hlavní autor: | |
|---|---|
| Médium: | Livre numérique |
| Jazyk: | Anglais |
| Vydáno: |
London :
Springer London
2010.
Cham : Springer Nature |
| Edice: | Springer Series in Advanced Manufacturing
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| On-line přístup: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Poznámka: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Precision nanometrology, sensors and measuring systems for nanomanufacturing, Wei Gao, 2010, London, Springer, 1 vol. (XIII-354 p.), Springer series in advanced manufacturing, 978-1-8499-6253-7 • Precision Nanometrology, Texte imprimé, 9781447157434 • Precision Nanometrology, Texte imprimé, 9781849962551 |
Obsah:
- Angle Sensor for Measurement of Surface Slope and Tilt Motion Laser Autocollimator for Measurement of Multi-axis Tilt Motion Surface Encoder for Measurement of In-plane Motion Grating Encoder for Measurement of In-plane and Out-of-plane Motion Scanning Multi-probe System for Measurement of Roundness Scanning Error Separation System for Measurement of Straightness Scanning Micro-stylus System for Measurement of Micro-aspherics Large Area Scanning Probe Microscope for Micro-textured Surfaces Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures Scanning Image-sensor System for Measurement of Micro-dimensions.