Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...
保存先:
| 第一著者: | |
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| フォーマット: | Livre numérique |
| 言語: | Anglais |
| 出版事項: |
London :
Springer London
2010.
Cham : Springer Nature |
| シリーズ: | Springer Series in Advanced Manufacturing
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| オンライン･アクセス: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| 注記: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Precision nanometrology, sensors and measuring systems for nanomanufacturing, Wei Gao, 2010, London, Springer, 1 vol. (XIII-354 p.), Springer series in advanced manufacturing, 978-1-8499-6253-7 • Precision Nanometrology, Texte imprimé, 9781447157434 • Precision Nanometrology, Texte imprimé, 9781849962551 |
| 要約: | Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to stage motions of precision machines. The first half of the book is dedicated to the description of optical sensors for the measurement of angle and displacement, which are fundamental quantities for precision nanometrology. The second half presents a number of scanning-type measuring systems for surface forms and stage motions. The systems discussed include: error separation algorithms and systems for measurement of straightness and roundness, the measurement of micro-aspherics, systems based on scanning probe microscopy, and scanning image-sensor systems. Precision Nanometrology presents the fundamental and practical technologies of precision nanometrology with a helpful selection of algorithms, instruments and experimental data. It will be beneficial for researchers, engineers and postgraduate students involved in precision engineering, nanotechnology and manufacturing. The Springer Series in Advanced Manufacturing publishes the best teaching and reference material to support students, educators and practitioners in manufacturing technology and management. This international series includes advanced textbooks, research monographs, edited works and conference proceedings covering all subjects in advanced manufacturing. The series focuses on new topics of interest, new treatments of more traditional areas and coverage of the applications of information and communication technology (ICT) in manufacturing. |
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| 記述事項: | Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| フォーマット: | Nécessite un lecteur de fichier PDF |
| ISBN: | 9781849962544 |
| ISSN: | 1860-5168 |
| アクセス: | Accès en ligne pour les établissements français bénéficiaires des licences nationales Accès soumis à abonnement pour tout autre établissement Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 |