Precision Nanometrology : Sensors and Measuring Systems for Nanomanufacturing
Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...
Salvato in:
| Autore principale: | |
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| Natura: | Livre numérique |
| Lingua: | Anglais |
| Pubblicazione: |
London :
Springer London
2010.
Cham : Springer Nature |
| Serie: | Springer Series in Advanced Manufacturing
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| Accesso online: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Precision nanometrology, sensors and measuring systems for nanomanufacturing, Wei Gao, 2010, London, Springer, 1 vol. (XIII-354 p.), Springer series in advanced manufacturing, 978-1-8499-6253-7 • Precision Nanometrology, Texte imprimé, 9781447157434 • Precision Nanometrology, Texte imprimé, 9781849962551 |