Mechanics of Microelectromechanical Systems
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion...
Gardado en:
| Auteurs principaux: | , |
|---|---|
| Formato: | Livre numérique |
| Idioma: | Anglais |
| Publicado: |
New York, NY :
Springer US
2005.
Cham : Springer Nature |
| Acceso en liña: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Mechanics of Microelectromechanical Systems, Texte imprimé, 9781402080135 • Mechanics of Microelectromechanical Systems, Texte imprimé, 9780387522494 • Mechanics of Microelectromechanical Systems, Texte imprimé, 9781489981165 |
Table des matières:
- Stiffness Basics
- Microcantilevers, Microhinges, Microbridges
- Microsuspensions
- Microtransduction: Actuation and Sensing
- Static Response of Mems
- Microfabrication, Materials, Precision and Scaling.