Interfacial Compatibility in Microelectronics : Moving Away from the Trial and Error Approach
Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult tas...
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| Main Authors: | Laurila, Tomi, Vuorinen, Vesa (Author), Paulasto-Kröckel, Mervi (Author), Turunen, Markus (Author), Mattila, Toni T. (Author), Kivilahti, Jorma (Author) |
|---|---|
| Format: | Livre numérique |
| Language: | Anglais |
| Published: |
London :
Springer London
[20..].
Cham : Springer Nature |
| Edition: | 2012. |
| Series: | Microsystems
|
| Online Access: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Interfacial Compatibility in Microelectronics, Texte imprimé, 9781447124696 • Interfacial Compatibility in Microelectronics, Texte imprimé, 9781447124719 • Interfacial Compatibility in Microelectronics, Texte imprimé, 9781447160687 |
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