High resolution x-ray scattering from thin films and multilayers

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems: thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dy...

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Bibliografiske detaljer
Auteurs principaux: Holý, Václav, Pietsch, Ulrich (Auteur), Baumbach, Tilo, 1961- (Auteur)
Format: Livre numérique
Sprog:Anglais
Udgivet: Berlin [etc.] : Springer [20..].
Cham : Springer Nature
Serier:Springer tracts in modern physics 149
Fag:
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Kommentar: Archives Springer e-books (Licence nationale)
Archives Springer e-books (Licence nationale)
Autres localisations: Voir dans le Sudoc
Edition sous un autre format:• High resolution x-ray scattering from thin films and multilayers, Vaclav Holy, Ullrich Pietsch, Tilo Baumbach, 1999, Berlin, Springer, 1 vol. (XI-256 p.), Springer tracts in modern physics, 3-540-62029-X
• High-Resolution X-Ray Scattering from Thin Films and Multilayers, Texte imprimé, 9783662147429
• High-Resolution X-Ray Scattering from Thin Films and Multilayers, Texte imprimé, 9783662147436
Indholdsfortegnelse:
  • Basic elements of the equipment
  • Diffractometers and reflectometers
  • Scans and resolution in angular and reciprocal space
  • Basic principles
  • Kinematical scattering theory
  • Dynamical scattering theory
  • Layer thicknesses of single layers and multilayers
  • Lattice parameters and lattice strains in single expitaxial layers
  • Volume defects in layers
  • X-ray reflection by rough multilayers
  • X-ray scattering by gratings and dots
  • A. Wave vectors and amplitudes of the internal wavefields in a dynamically scattering crystal.