Low-energy ion irradiation of solid surfaces
The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization proc...
Spremljeno u:
| Glavni autor: | |
|---|---|
| Format: | Livre numérique |
| Jezik: | Anglais |
| Izdano: |
Berlin [etc.] :
Springer
[20..].
Cham : Springer Nature |
| Serija: | Springer tracts in modern physics
146 |
| Teme: | |
| Online pristup: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Bilješka: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Low-energy ion irradiation of solid surfaces, Hubert Gnaser, 1999, Berlin, Springer, 1 vol. (VIII-293 p.), Springer tracts in modern physics, 3-540-65007-5 • Low-Energy Ion Irradiation of Solid Surfaces, Texte imprimé, 9783662147382 • Low-Energy Ion Irradiation of Solid Surfaces, Texte imprimé, 9783662147399 |
Sadržaj:
- Interaction of low-energy ions with solids
- Composition changes in multicomponent materials
- Ion bombardment of crystalline semiconductors
- Ionization processes of sputtered atoms and molecules.