Microsystems dynamics
In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added be...
Enregistré dans:
| Auteurs principaux: | , |
|---|---|
| Format: | Livre numérique |
| Langue: | Anglais |
| Publié: |
Dordrecht :
Springer Netherlands
2011.
Cham : Springer Nature |
| Collection: | Intelligent Systems, Control and Automation: Science and Engineering
44 |
| Accès en ligne: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Microsystems Dynamics, Texte imprimé, 9789048197002 • Microsystems Dynamics, Texte imprimé, 9789048197026 • Microsystems Dynamics, Texte imprimé, 9789400734104 |
Table des matières:
- Foreword
- Preface
- Introduction to Microsystems
- Fabrication Technologies of Microsystems
- Overview
- Nickel Surface Micromachining Technology for Fabrication of Microswitches
- UV Lithography for Fabrication of Micromotors
- Common MEMS Actuators
- Parallel Plate Capacitors
- Comb Drives
- Electrostatic Micromotors
- Electrostatic Microswitches
- Theoretical Background of Multiphysical Interactions Common in Microsystems
- Introduction to Coupled-Field Modeling
- Electrostatic Actuation and Pull-in Instability
- Viscous Air Damping
- Vibro-Impact Interactions
- Experimental Testing of Microsystem Dynamics
- Vibration Excitation Methods
- Optical Techniques for Measurement of Vibrations of Microstructures
- Study of Elastic Vibro-Impact Macrosystems and Microsystems
- Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact
- Macrosystems
- Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator
- Numerical Modeling and Analysis of Fluidic-Structural Interaction
- Numerical Modeling and Analysis of Electrostatic-Structural Interaction
- Numerical Modeling and Analysis of Vibro-Impact Interaction
- Numerical Analysis of the Micromotor
- Finite Element Modeling of Micromotor
- Modal Analysis
- Micromotor Control
- Analytical Model of a Micromotor
- Basics of Micromotor Geometry
- Torque Analysis
- Micromotor Design Guidelines
- References.