Microsystems and nanotechnology
Microsystems and Nanotechnology presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advan...
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| Autres auteurs: | , , |
|---|---|
| Format: | Livre numérique |
| Langue: | Anglais |
| Publié: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer
[20..].
Cham : Springer Nature |
| Accès en ligne: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Microsystems and nanotechnologys, Zhaoying Zhou, Zhonglin Wang, Liwei Lin, Beijing, Tsinghua Univ. Press, Springer, 2012, 1 vol. (XXII-1004 p.), 978-7-302-24307-6 |
Table des matières:
- Part 1.The Fundamentals of Microsystems and Nanotechnology.- Information Electronics Of Nano-era Micro/Nano Fluidics Materials Problems in MEMS Nanomechanics in Crossed Multidiscipline Nano Structure and Monomolecular Electronic Transport Feature Nanomaterials structural Analysis and Attribute Part 2.Microsystems MEMS Introduction Micro Electromechanical Sensor Microactuator MEMS Design MEMS Processing and Fabrication Techniques and Technology Optical MEMS and Nano-Photonics Introduction of MEMS Packaging Part 3.Nanotechnology.- Nanotube , Nanoware , Nanobelt Semiconductor NanoCrystal-- Quantum Dot ,Quantum Wire, Quantum Rod The Application of STM and AFM in Nano Process and Fabrication Nanoscale Fabrication Integration Nanotechnology based on MEMS Manufacture Technology Part 4.Microsystems and Nanotechnology Application MEMS Application Micro-electromechanical Sensor System A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry MEMS in Automobile Biochips Nanotechnology in Biological and Medical Applications Part 5.Development and Prospect Development and Prospect