Microsystems and nanotechnology
Microsystems and Nanotechnology presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advan...
Gardado en:
| Outros autores: | , , |
|---|---|
| Formato: | Livre numérique |
| Idioma: | Anglais |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Imprint: Springer
[20..].
Cham : Springer Nature |
| Acceso en liña: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Microsystems and nanotechnologys, Zhaoying Zhou, Zhonglin Wang, Liwei Lin, Beijing, Tsinghua Univ. Press, Springer, 2012, 1 vol. (XXII-1004 p.), 978-7-302-24307-6 |
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| 245 | 0 | 0 | |a Microsystems and nanotechnology |c edited by Zhaoying Zhou, Zhonglin Wang, Liwei Lin. |
| 260 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg : |b Imprint: Springer. | ||
| 260 | |a Cham : |b Springer Nature, |c [20..]. | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 505 | 1 | |a Part 1.The Fundamentals of Microsystems and Nanotechnology.- Information Electronics Of Nano-era Micro/Nano Fluidics Materials Problems in MEMS Nanomechanics in Crossed Multidiscipline Nano Structure and Monomolecular Electronic Transport Feature Nanomaterials structural Analysis and Attribute Part 2.Microsystems MEMS Introduction Micro Electromechanical Sensor Microactuator MEMS Design MEMS Processing and Fabrication Techniques and Technology Optical MEMS and Nano-Photonics Introduction of MEMS Packaging Part 3.Nanotechnology.- Nanotube , Nanoware , Nanobelt Semiconductor NanoCrystal-- Quantum Dot ,Quantum Wire, Quantum Rod The Application of STM and AFM in Nano Process and Fabrication Nanoscale Fabrication Integration Nanotechnology based on MEMS Manufacture Technology Part 4.Microsystems and Nanotechnology Application MEMS Application Micro-electromechanical Sensor System A Surface Micromachined Accelerometer with Integrated CMOS Detection Circuitry MEMS in Automobile Biochips Nanotechnology in Biological and Medical Applications Part 5.Development and Prospect Development and Prospect | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a Microsystems and Nanotechnology presents the latest science and engineering research and achievements in the fields of microsystems and nanotechnology, bringing together contributions by authoritative experts from the United States, Germany, Great Britain, Japan and China to discuss the latest advances in microelectromechanical systems (MEMS) technology and micro/nanotechnology. The book is divided into five parts the fundamentals of microsystems and nanotechnology, microsystems technology, nanotechnology, application issues, and the developments and prospects and is a valuable reference for students, teachers and engineers working with the involved technologies.Professor Zhaoying Zhou is a professor at the Department of Precision Instruments & Mechanology , Tsinghua University , and the Chairman of the MEMS & NEMS Society of China. Dr. Zhonglin Wang is the Director of the Center for Nanostructure Characterization, Georgia Tech, USA. Dr. Liwei Lin is a Professor at the Department of Mechanical Engineering, University of California at Berkeley, USA | ||
| 700 | 1 | |a Zhou, Zhaoying. |4 pbd | |
| 700 | 1 | |a Wang, Zhong Lin. |4 pbd | |
| 700 | 1 | |a Lin, Liwei, |d 19. |4 pbd | |
| 776 | 0 | |0 16235066X |t Microsystems and nanotechnologys |f Zhaoying Zhou, Zhonglin Wang, Liwei Lin |c Beijing |n Tsinghua Univ. Press |n Springer |d 2012 |p 1 vol. (XXII-1004 p.) |z 978-7-302-24307-6 | |
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