Style de citation APA (7e éd.)

Hattori, T. Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing. Springer International Publishing.

Style de citation Chicago (17e éd.)

Hattori, Takeshi. Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing. Cham: Springer International Publishing.

Style de citation MLA (8e éd.)

Hattori, Takeshi. Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing. Springer International Publishing.