Multilayer integrated film bulk acoustic resonators
Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Livre numérique |
| Sprache: | Anglais |
| Veröffentlicht: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
2013.
Cham : Springer Nature |
| Online Zugang: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Anmerkung: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Multilayer Integrated Film Bulk Acoustic Resonators, Texte imprimé, 9783642317750 • Multilayer Integrated Film Bulk Acoustic Resonators, Texte imprimé, 9783642317774 • Multilayer Integrated Film Bulk Acoustic Resonators, Texte imprimé, 9783642427558 |
Inhaltsangabe:
- Introduction
- Propagation of Acoustic Wave in Crystals
- The Theory of FBAR
- The Sputtering Deposition and Etching of AlN Film
- The Membrane Structured FBAR
- Solidly Mounted Acoustic Resonator
- The Application of FBAR in RF Filters
- The FBAR Excited by Lateral Filed
- High Sensitive Sensors Based on FBAR.