Multilayer integrated film bulk acoustic resonators
Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated...
Gardado en:
| Auteurs principaux: | , |
|---|---|
| Formato: | Livre numérique |
| Idioma: | Anglais |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
2013.
Cham : Springer Nature |
| Acceso en liña: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Multilayer Integrated Film Bulk Acoustic Resonators, Texte imprimé, 9783642317750 • Multilayer Integrated Film Bulk Acoustic Resonators, Texte imprimé, 9783642317774 • Multilayer Integrated Film Bulk Acoustic Resonators, Texte imprimé, 9783642427558 |
| LEADER | 03280nam a22003377a 4500 | ||
|---|---|---|---|
| 001 | 950059 | ||
| 008 | 130325s2013 xx ||| |||| 00| 0 eng d | ||
| 009 | PPN168320304 | ||
| 020 | |a 9783642317767 | ||
| 041 | 0 | |a eng | |
| 082 | |a 620.5 | ||
| 100 | 1 | |a Zhang, Yafei. | |
| 245 | 1 | 0 | |a Multilayer integrated film bulk acoustic resonators |c by Yafei Zhang, Da Chen. |
| 260 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg. | ||
| 260 | |a Cham : |b Springer Nature, |c 2013. | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 505 | 0 | |a Introduction -- Propagation of Acoustic Wave in Crystals -- The Theory of FBAR -- The Sputtering Deposition and Etching of AlN Film -- The Membrane Structured FBAR -- Solidly Mounted Acoustic Resonator -- The Application of FBAR in RF Filters -- The FBAR Excited by Lateral Filed -- High Sensitive Sensors Based on FBAR. | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. chttps://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a Multilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student inProf. Yafei Zhang s research group. | ||
| 700 | 1 | |a Chen, Da. |4 aut | |
| 776 | 0 | |t Multilayer Integrated Film Bulk Acoustic Resonators |b Texte imprimé |z 9783642317750 | |
| 776 | 0 | |t Multilayer Integrated Film Bulk Acoustic Resonators |b Texte imprimé |z 9783642317774 | |
| 776 | 0 | |t Multilayer Integrated Film Bulk Acoustic Resonators |b Texte imprimé |z 9783642427558 | |
| 856 | 4 | |q PDF |u https://doi.org/10.1007/978-3-642-31776-7 |z Accès sur la plateforme de l'éditeur | |
| 856 | 4 | |u https://revue-sommaire.istex.fr/ark:/67375/8Q1-WTNKHBWV-T |z Accès sur la plateforme Istex | |
| 856 | 4 | |5 452349901:748064257 |u https://ezproxy.univ-orleans.fr/login?url=https://doi.org/10.1007/978-3-642-31776-7 |z Accès Université d'Orléans | |
| 856 | 4 | |5 180339901:751515957 |u https://ezproxy.insa-cvl.fr/login?qurl=https://doi.org/10.1007/978-3-642-31776-7 |z Accès INSA CVL | |
| 997 | |0 950059 |1 Livre numérique |a Ressource numérique |b INSA |b ENSA |c 0/Bibliothèque numérique/ |c 1/Bibliothèque numérique/Autre ressource numérique/ | ||