Excimer laser technology
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this co...
Gardado en:
| Outros autores: | , |
|---|---|
| Formato: | Livre numérique |
| Idioma: | Anglais |
| Publicado: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
[20..].
Cham : Springer Nature |
| Edición: | 1st ed. 2005. |
| Sujets: | |
| Acceso en liña: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Excimer laser technology, Basting and G. Marowsky, Berlin, Springer/Praxis, 2004, XIX-433 p., Advanced texts in physics, 3-540-20056-8 |
Table des matières:
- Introductory Remarks Fundamentals Some Fundamentals of Laser Physics Principles of Excimer Lasers Design and Technology of Excimer Lasers High-Repetition-Rate and High-Power Lasers High-Energy Lasers Excimer Lasers for Microlithography Laser Beam Characterization Optical Coatings for Excimer Laser Applications Small Structures with Large Excimer Lasers Historical Review of Excimer Laser Development Applications Overview Ablation Micro-Machining Via Drilling Micro-Processing of Borosilicate Glass and Polymers F2-Laser Microfabrication for Photonics and Biophotonics Nano-Structuring with Femtosecond Excimer Laser Pulses Physical Aspects of Ultra-Fast UV Laser Transfer Microlithography TFT Annealing Fiber Bragg Gratings Marking Activation and Metallization of Dielectrics Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films Combustion Analysis Medical Applications of Excimer Lasers High-Intensity Applications of Excimer Lasers High-Repetition-Rate Applications of Excimer Lasers New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm Trends in Worldwide Excimer Laser Sales