Electroceramic-Based MEMS : Fabrication-Technology and Applications
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...
Guardado en:
| Autor principal: | |
|---|---|
| Formato: | Livre numérique |
| Lenguaje: | Anglais |
| Publicado: |
New York, NY :
Springer US
[20..].
Cham : Springer Nature |
| Edición: | 1st ed. 2005. |
| Colección: | Electronic Materials: Science & Technology
9 |
| Acceso en línea: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Nota: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Electroceramic-based MEMS, Fabrication technology and applications, edited by Nava Setter, ..., New York, Springer, 2005, 1 vol. (414 p.), 0-387-23310-5 • Electroceramic-Based MEMS, Texte imprimé, 9781441936042 • Künstliche Intelligenz, proceedings, GWAI-88, 12. Jahrestagung, Eringerfeld, 19-23 September 1988, 1988, Berlin, Springer, 1 vol. (XII-333 p.), Informatik-Fachberichte, 3-540-50293-9 |
Tabla de Contenidos:
- Applications and Devices MEMS-Based Thin Film and Resonant Chemical Sensors Microactuators Based on Thin Films Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films Thick-Film Piezoelectric and Magnetostrictive Devices Micromachined Infrared Detectors Based on Pyroelectric Thin Films RF Bulk Acoustic Wave Resonators and Filters High Frequency Tuneable Devices Based on Thin Ferroelectric Films MEMS for Optical Functionality Materials, Fabrication-Technology, and Functionality Ceramic Thick Films for MEMS Thin Film Piezoelectrics for MEMS Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics Microfabrication of Piezoelectric MEMS Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics Low-Cost Patterning of Ceramic Thin Films