Piezoresistor design and applications

This book is a comprehensive guide to piezoresistive MEMS sensor design. Piezoresistors transduce mechanical loads into electrical signals via a resistance change, and comprise a substantial portion of the commercial MEMS sensors market. Applications of piezoresistors include strain gauges, accelero...

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Hlavní autoři: Doll, Joseph C., Pruitt, Beth L. (Autor)
Médium: Livre numérique
Jazyk:Anglais
Vydáno: New York, NY : Springer New York 2013.
Cham : Springer Nature
Edice:Microsystems and Nanosystems
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Poznámka: Archives Springer e-books (Licence nationale)
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Edition sous un autre format:• Piezoresistor Design and Applications, Texte imprimé, 9781461485186
• Piezoresistor Design and Applications, Texte imprimé, 9781493955541
• Piezoresistor design and applications, Joseph C. Doll, Beth L. Pruitt., New York, Springer, 2013, 1 vol. (XI- 245 p.), Microsystems and Nanosystems, 978-1-46148516-2
Obsah:
  • Introduction
  • Piezoresistance fundamentals
  • Sensitivity, noise and resolution
  • Fabrication and process modeling
  • Temperature effects
  • Design optimization
  • Alternative materials and transduction methods.