Helium Ion Microscopy : Principles and Applications
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions such as the Helium Ion Microscope (HIM) are destined to become the imaging tools of choice for the 21st century. Topics covered include th...
Enregistré dans:
| Hovedforfatter: | |
|---|---|
| Format: | Livre numérique |
| Sprog: | Anglais |
| Udgivet: |
New York, NY :
Springer New York
2013.
Cham : Springer Nature |
| Serier: | SpringerBriefs in Materials
|
| Online adgang: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Kommentar: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Helium ion microscopy, principles and applications, David C. Joy, New York, Springer, 2013, 1 vol. (viii-64 p.), SpringerBriefs in materials, 978-1-461-48659-6 • Helium Ion Microscopy, Texte imprimé, 9781461486619 |
Indholdsfortegnelse:
- Chapter 1: Introduction to Helium Ion Microscopy
- Chapter 2: Microscopy with Ions - A brief history
- Chapter 3: Operating the Helium Ion Microscope
- Chapter 4: Ion Solid Interactions and Image Formation
- Chapter 5: Charging and Damage
- Chapter 6: Microanalysis with the HIM
- Chapter 7: Ion Generated Damage
- Chapter 8: Working with other Ion beams
- Chapter 9: Patterning and Nanofabrication
- Conclusion
- Bibliography
- Appendix: iSE Yields, and IONiSE parameters for He+ excitation of Elements and Compounds
- Index.