Sputtering by particle bombardment I : physical sputtering of single-element solids
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| Daljnji autori: | |
|---|---|
| Format: | Livre numérique |
| Jezik: | Anglais |
| Izdano: |
Berlin [etc.] :
Springer-Verlag : Springer e-books
[20..].
Cham : Springer Nature |
| Serija: | Topics in applied physics
47 |
| Teme: | |
| Online pristup: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Bilješka: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Sputtering by particle bombardment, ed. by R. Behrisch, 1, Physical sputtering of single-element solids, with contributions by H.H. Andersen... [et al.], 1981, Berlin [etc.], Springer, 1 vol. (X-281 p.), Topics in applied physics, 3-540-10521-2 • Sputtering by Particle Bombardment I, Texte imprimé, 9783662308875 • Sputtering by Particle Bombardment I, Texte imprimé, 9783662308882 |
Sadržaj:
- and overview
- Sputtering by ion bombardment theoretical concepts
- Theoretical aspects of monocrystal sputtering
- Sputtering yield measurements
- Sputtering yields of single crystalline targets.