Sputtering by particle bombardment II : sputtering of alloys and compounds, electron and neutron sputtering, surface topography
Kaydedildi:
| Diğer Yazarlar: | |
|---|---|
| Materyal Türü: | Livre numérique |
| Dil: | Anglais |
| Baskı/Yayın Bilgisi: |
Berlin [etc.] :
Springer-Verlag : Springer e-books
[20..].
Cham : Springer Nature |
| Seri Bilgileri: | Topics in applied physics
52 |
| Konular: | |
| Online Erişim: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Not: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Sputtering by particle bombardment, ed. by R. Behrisch, 2, Sputtering of alloys and compounds, electron and neutron sputtering, surface topography, with contributions by R. Behrisch... [et al.], Berlin [etc.], Springer, 1983, 1 volume (XII-391 p.), Topics in applied physics, 3-540-12593-0 • Sputtering by Particle Bombardment II, Texte imprimé, 9783662311684 • Sputtering by Particle Bombardment II, Texte imprimé, 9783662311691 |
İçindekiler:
- and overview
- Sputtering of multicomponent materials
- Chemical sputtering
- Sputtering by electrons and photons
- Sputtering of solids with neutrons
- Heavy ion sputtering induced surface topography development
- Development of surface topography due to gas ion implantation.