Sputtering by particle bombardment. III, Characteristics of sputtered particles, technical applications
Sputtering, the ejection of atoms or groups of atoms from the surface of a solid bombarded by energetic particles, is a widely observed phenomenon that has many applications in today's experimental physics and technology. This is the third and final volume of a comprehensive review on sputterin...
Zapisane w:
| Kolejni autorzy: | , |
|---|---|
| Format: | Livre numérique |
| Język: | Anglais |
| Wydane: |
Berlin ; Paris [etc.] :
Springer-Verlag : Springer e-books
[20..].
Cham : Springer Nature |
| Seria: | Topics in applied physics
64 |
| Hasła przedmiotowe: | |
| Dostęp online: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Komentarz: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Sputtering by Particle Bombardment III, Texte imprimé, 9783540534280 • Sputtering by Particle Bombardment III, Texte imprimé, 9783662311035 • Sputtering by Particle Bombardment III, Texte imprimé, 9783662311042 |
Spis treści:
- Angular, energy, and mass distribution of sputtered particles
- Charged and excited states of sputtered atoms
- Surface and depth analysis based on sputtering
- Desorption of organic molecules from solid and liquid surfaces induced by particle impact
- Production of microstructures by ion beam sputtering
- Production of thin films by controlled deposition of sputtered material.