MEMS : a practical guide to design, analysis, and applications
MEMS are rapidly moving from the research laboratory to the mar ketplace. Many market studies indicate not only a tremendous market potential of MEMS devices; year by year we see the actual market grow as the technology matures. In fact, these days, many large silicon foundries have a MEMS group exp...
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| Main Authors: | , |
|---|---|
| Format: | Livre numérique |
| Language: | Anglais |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
2006.
Cham : Springer Nature |
| Online Access: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • MEMS, a practical guide to design, analysis, and applications, edited by Jan G. Korvink and Oliver Paul, Norwich, NY, W. Andrew, Springer, 2006, 1 vol. (XXV-965 p.), 0-8155-1497-2 • MEMS: A Practical Guide of Design, Analysis, and Applications, Texte imprimé, 9783540860297 • MEMS: A Practical Guide of Design, Analysis, and Applications, Texte imprimé, 9783662568354 |
Table of Contents:
- Microtransducer Operation
- Material Properties: Measurement and Data
- MEMS and NEMS Simulation
- System-Level Simulation of Microsystems
- Thermal-Based Microsensors
- Photon Detectors
- Free-Space Optical MEMS
- Integrated Micro-Optics
- Microsensors for Magnetic Fields
- Mechanical Microsensors
- Semiconductor-Based Chemical Microsensors
- Microfluidics
- Biomedical Systems
- Microactuators
- Micromachining Technology
- LIGA Technology for R&D and Industrial Applications
- 17 Interface Circuitry and Microsystems.