Multi-Wafer Rotating MEMS Machines : Turbines, Generators, and Engines
Multi-Wafer Rotating MEMS Machines: Turbines, Generators, and Engines is an outgrowth of the MIT Micro Engine Project. This project began at the Massachusetts Institute of Technology in the Fall of 1995, and later expanded through collaborations with the Georgia Institute of Technology, the Clark At...
Uloženo v:
| Hlavní autor: | |
|---|---|
| Médium: | Livre numérique |
| Jazyk: | Anglais |
| Vydáno: |
Boston, MA :
Springer US : Imprint: Springer
[20..].
Cham : Springer Nature |
| Edice: | MEMS Reference Shelf
|
| On-line přístup: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Poznámka: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Multi-Wafer Rotating MEMS Machines, Texte imprimé, 9780387777467 |
Obsah:
- to PowerMEMS System Design Considerations and Device Overview Materials, Structures and Packaging Microengine Fabrication Fabrication of Microscale Rotating Magnetic Machines High-Speed Gas Bearings for Micro-Turbomachinery Thermofluidics and Turbomachinery Motors and Generators Microcombustors for Rotating Machinery