Low Pressure Plasmas and Microstructuring Technology
This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...
Đã lưu trong:
| Tác giả chính: | |
|---|---|
| Định dạng: | Livre numérique |
| Ngôn ngữ: | Anglais |
| Được phát hành: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Springer e-books
[20..].
Cham : Springer Nature |
| Truy cập trực tuyến: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Chú thích: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Low Pressure Plasmas and Microstructuring Technology, Texte imprimé, 9783540858485 |
Mục lục:
- Collisions and cross sections The plasma DC discharges High-frequency discharges I High-frequency discharges II High-frequency discharges III Ion beam systems Plasma diagnostics Plasma deposition processes Plasma etch processes Etch Mechanisms Outlook Advanced Topics