Low Pressure Plasmas and Microstructuring Technology
This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...
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| Tác giả chính: | |
|---|---|
| Định dạng: | Livre numérique |
| Ngôn ngữ: | Anglais |
| Được phát hành: |
Berlin, Heidelberg :
Springer Berlin Heidelberg : Springer e-books
[20..].
Cham : Springer Nature |
| Truy cập trực tuyến: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Chú thích: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Low Pressure Plasmas and Microstructuring Technology, Texte imprimé, 9783540858485 |
| LEADER | 03617nam a22003137a 4500 | ||
|---|---|---|---|
| 001 | 941483 | ||
| 008 | 090610q2000 xx ||| |||| 00| 0 eng d | ||
| 009 | PPN134130294 | ||
| 020 | |a 9783540858492 | ||
| 041 | 0 | |a eng | |
| 082 | |a 620.11295 | ||
| 082 | |a 620.11297 | ||
| 100 | 1 | |a Franz, Gerhard. | |
| 245 | 1 | 0 | |a Low Pressure Plasmas and Microstructuring Technology |c by Gerhard Franz. |
| 260 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg : |b Springer e-books. | ||
| 260 | |a Cham : |b Springer Nature, |c [20..]. | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 505 | 1 | |a Collisions and cross sections The plasma DC discharges High-frequency discharges I High-frequency discharges II High-frequency discharges III Ion beam systems Plasma diagnostics Plasma deposition processes Plasma etch processes Etch Mechanisms Outlook Advanced Topics | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electron cyclotron resonance, and ion beams. To compare these theories with inert plasmas, a fundamental description of plasma diagnostics is presented on the basis of four prominent methods and extended to reactive plasmas.The second part extensively deals with the interaction of these plasmas with surfaces in order to coat or to etch them with reactive gases. Main topics are sputtering, plasma-enhanced chemical vapor deposition, and reactive ion etching. The difficulties which had to be overcome to reach the next technological node in the semiconductor map are documented by a long row of microfeatures. These processes and corresponding microscopic mechanisms are discussed in the final section of this part. In the concluding third part, various fundamental derivations are minutely extended which are required for a deep understanding of the plasma processes. In retrospect, the semiconductor industry has triggered the development of new methods to excite plasmas. But it was now the industrial part to operate these plasmas with reactive gases. As a result of this combined effort, surface modifications with plasmas are now in widespread use even in low-cost applications due to its easy and convenient implantation as well as its favorable environmental impact | ||
| 776 | 0 | |t Low Pressure Plasmas and Microstructuring Technology |b Texte imprimé |z 9783540858485 | |
| 856 | 4 | |q PDF |u https://doi.org/10.1007/978-3-540-85849-2 |z Accès sur la plateforme de l'éditeur | |
| 856 | 4 | |u https://revue-sommaire.istex.fr/ark:/67375/8Q1-5Q49BHWQ-6 |z Accès sur la plateforme Istex | |
| 856 | 4 | |5 452349901:747847045 |u https://ezproxy.univ-orleans.fr/login?url=https://doi.org/10.1007/978-3-540-85849-2 |z Accès Université d'Orléans | |
| 856 | 4 | |5 180339901:750864583 |u https://ezproxy.insa-cvl.fr/login?qurl=https://doi.org/10.1007/978-3-540-85849-2 |z Accès INSA CVL | |
| 997 | |0 941483 |1 Livre numérique |a Ressource numérique |b INSA |b ENSA |c 0/Bibliothèque numérique/ |c 1/Bibliothèque numérique/Autre ressource numérique/ | ||