Control and optimization of multiscale process systems
Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly couple...
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| Hlavní autoři: | , , , |
|---|---|
| Médium: | Livre numérique |
| Jazyk: | Anglais |
| Vydáno: |
Boston, MA :
Birkhäuser Boston
[20..].
Cham : Springer Nature |
| Edice: | Control Engineering
|
| On-line přístup: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Poznámka: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Control and Optimization of Multiscale Process Systems, Texte imprimé, 9780817647926 • Control and Optimization of Multiscale Process Systems, Texte imprimé, 9780817672454 |