MEMS/NEMS : Handbook Techniques and Applications
Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical c...
Zapisane w:
| 1. autor: | |
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| Format: | Livre numérique |
| Język: | Anglais |
| Wydane: |
New York, NY :
Springer US
2006.
Cham : Springer Nature |
| Dostęp online: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Komentarz: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Mems/Nems, Texte imprimé, 9780387505213 • Mems/Nems, Texte imprimé, 9780387245201 • Mems/Nems, Texte imprimé, 9781489977397 |
Spis treści:
- Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices
- Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS
- Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)
- Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications
- Techniques in Global Optimal Design for MEMS & Their Applications
- Theory and Design of Micromechanical Vibratory Gyroscopes
- A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS)
- Techniques in Electrostatics Analysis of MEMS and Their Applications
- Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
- Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications
- Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications
- GaAs Thermally Based MEMS Devices Fabrication Techniques, Characterization and Modeling
- Novel MEMS Fluidic Integrated Circuit Technology with MOSFET-Like Microvalve Elements
- Hydrogel-based ?TAS
- Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication
- MEMS/NEMS Techniques and Applications
- Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology
- Tool-based Micro Machining and Applications in MEMS
- Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application
- Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices
- Injection Molding Techniques for the Fabrication of MEMS Elements
- Excimer Laser Micromachined Three-dimensional Microstructures Techniques and Applications
- Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems
- Production Scheduling in MEMS Manufacturing
- MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives
- Micromachined Thermal Accelerometer without Proof Mass
- Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications
- Modeling the Electromechanical Response of Electrostatic Actuators
- Micropumps for MEMS/NEMS and Microfluidic Systems
- FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators
- Techniques in the Design of Thermomechanical Microactuators
- Techniques in MEMS Microthermal Actuators and Their Applications
- Techniques in Residual Stress Measurement for MEMS and Their Applications
- Techniques in Sonophoresis Biomedical Devices and Their Applications
- MEMS Application of Actuators and Sensors for Glaucoma Treatment
- Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications
- Techniques in the Development of Endovascular Microtools & Their Applications
- Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems
- Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors
- Magnetic Microactuators Techniques and Applications
- Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications
- Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications
- Three-Dimensional Techniques for FEM Simulations in Laser Modules and Their Applications.