Sputtering by Particle Bombardment : Experiments and Computer Calculations from Threshold to MeV Energies
This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and...
Enregistré dans:
| 主要作者: | |
|---|---|
| 其他作者: | |
| 格式: | Livre numérique |
| 語言: | Anglais |
| 出版: |
Berlin, Heidelberg :
Springer Berlin Heidelberg
[20..].
Cham : Springer Nature |
| 版: | 1st ed. 2007. |
| 叢編: | Topics in Applied Physics
110 |
| 主題: | |
| 在線閱讀: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| 提示: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Sputtering by particle bombardment, experiments and computer calculations from threshold to MeV energies, Rainer Behrisch, Wolfgang Eckstein (eds.), Berlin, Springer, 2007, 1 vol. (XVII-507 p.), Topics in applied physics, 978-3-540-44500-5 |
| LEADER | 03386nam a22004097a 4500 | ||
|---|---|---|---|
| 001 | 939159 | ||
| 008 | 080410q2000 xx ||| |||| 00| 0 eng d | ||
| 009 | PPN123157161 | ||
| 020 | |a 9783540445029 | ||
| 041 | 0 | |a eng | |
| 082 | |a 620.44 | ||
| 082 | |a 530.416 | ||
| 082 | |a 540 | ||
| 100 | 1 | |a Behrisch, Rainer, |d 1934-2011. | |
| 245 | 1 | 0 | |a Sputtering by Particle Bombardment : |b Experiments and Computer Calculations from Threshold to MeV Energies |c edited by Rainer Behrisch, Wolfgang Eckstein. |
| 250 | |a 1st ed. 2007. | ||
| 260 | |a Berlin, Heidelberg : |b Springer Berlin Heidelberg. | ||
| 260 | |a Cham : |b Springer Nature, |c [20..]. | ||
| 490 | 0 | |a Topics in Applied Physics |v 110 |x 1437-0859 | |
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 505 | 1 | |a and Overview Computer Simulation of the Sputtering Process Sputtering Yields Results of Molecular Dynamics Calculations Energy and Angular Distributions of Sputtered Species Chemical Sputtering Electronic Sputtering with Swift Heavy Ions | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a This volume gives a comprehensive overview about the physical processes causing sputtering of solids at bombardment with energetic ions. The most important quantities are the sputtering yields, i.e. the average number of atoms eroded per incident ion. The latest results for the sputtering yields and their dependence on the incident energy and angle of incidence, as well as the energy and angular distributions of the sputtered atoms are presented. This concerns experimentally determined yields as well as a critical evaluation of the computational methods used to calculate the yields and distributions. The energies of the incident ions cover the range between a few eV up to several MeV. The influence of chemical effects between the incident ions and the atoms of the bombarded solid on the sputtering yields are also reviewed | ||
| 650 | |a Pulvérisation cathodique | ||
| 650 | |a Bombardement ionique | ||
| 650 | |a Chimie | ||
| 650 | |a Surfaces (technologie) | ||
| 700 | 1 | |a Eckstein, Wolfgang, |d 1935- |4 pbd | |
| 776 | 0 | |0 12006684X |t Sputtering by particle bombardment |o experiments and computer calculations from threshold to MeV energies |f Rainer Behrisch, Wolfgang Eckstein (eds.) |c Berlin |n Springer |d 2007 |p 1 vol. (XVII-507 p.) |s Topics in applied physics |z 978-3-540-44500-5 | |
| 856 | 4 | |q PDF |u https://doi.org/10.1007/978-3-540-44502-9 |z Accès sur la plateforme de l'éditeur | |
| 856 | 4 | |u https://revue-sommaire.istex.fr/ark:/67375/8Q1-39JKGFGK-H |z Accès sur la plateforme Istex | |
| 856 | 4 | |5 452349901:747885257 |u https://ezproxy.univ-orleans.fr/login?url=https://dx.doi.org/10.1007/978-3-540-44502-9 |z Accès Université d'Orléans | |
| 856 | 4 | |5 180339901:750898046 |u https://ezproxy.insa-cvl.fr/login?qurl=https://dx.doi.org/10.1007/978-3-540-44502-9 |z Accès INSA CVL | |
| 997 | |0 939159 |1 Livre numérique |a Ressource numérique |b INSA |b ENSA |c 0/Bibliothèque numérique/ |c 1/Bibliothèque numérique/Autre ressource numérique/ | ||