Micro and nanomanufacturing
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication te...
Gespeichert in:
| 1. Verfasser: | |
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| Format: | Livre numérique |
| Sprache: | Anglais |
| Veröffentlicht: |
Boston, MA :
Springer US
[20..].
Cham : Springer Nature |
| Schlagworte: | |
| Online Zugang: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Anmerkung: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Micro and nanomanufacturing, Mark J. Jackson, New York, Springer, 2007, 1 vol. (X-699 p.), 978-0-387-25874-4 |
Inhaltsangabe:
- Principles of Micro- and Nanofabrication Microfabrication Using X- ray Lithography Manufacturing High Aspect Ratio Microstructures Meso-Micromachining Mechanical Micromachining Microgrinding Diamond Microcutting Tools Laser Micro- and Nanofabrication Micromachining Using Pulsed Water Droplets Diamond Nanogrinding Nanomachining Micro-and Nanomanufacturing