Micro and nanomanufacturing
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication te...
保存先:
| 第一著者: | |
|---|---|
| フォーマット: | Livre numérique |
| 言語: | Anglais |
| 出版事項: |
Boston, MA :
Springer US
[20..].
Cham : Springer Nature |
| 主題: | |
| オンライン･アクセス: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| 注記: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Micro and nanomanufacturing, Mark J. Jackson, New York, Springer, 2007, 1 vol. (X-699 p.), 978-0-387-25874-4 |
| LEADER | 03380nam a22003497a 4500 | ||
|---|---|---|---|
| 001 | 937672 | ||
| 008 | 071221q2000 xxg ||| |||| 00| 0 eng d | ||
| 009 | PPN120201100 | ||
| 020 | |a 038726132X | ||
| 020 | |a 9780387261324 | ||
| 041 | 0 | |a eng | |
| 082 | |a 621 | ||
| 100 | 1 | |a Jackson, Mark J., |d 19..- | |
| 245 | 1 | 0 | |a Micro and nanomanufacturing |c Mark J. Jackson. |
| 260 | |a Boston, MA : |b Springer US. | ||
| 260 | |a Cham : |b Springer Nature, |c [20..]. | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 500 | |a Archives Springer e-books (Licence nationale) | ||
| 504 | |a Réféférences bibliographiques en fin de chapitres. Index | ||
| 505 | 1 | |a Principles of Micro- and Nanofabrication Microfabrication Using X- ray Lithography Manufacturing High Aspect Ratio Microstructures Meso-Micromachining Mechanical Micromachining Microgrinding Diamond Microcutting Tools Laser Micro- and Nanofabrication Micromachining Using Pulsed Water Droplets Diamond Nanogrinding Nanomachining Micro-and Nanomanufacturing | |
| 506 | |a Accès en ligne pour les établissements français bénéficiaires des licences nationales | ||
| 506 | |a Accès soumis à abonnement pour tout autre établissement | ||
| 506 | |a Conditions particulières de réutilisation pour les bénéficiaires des licences nationales. https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 | ||
| 520 | |a Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components/systems. Micro and Nanomanufacturing provides a comprehensive treatment of established micro & nano fabrication techniques and addresses the needs of practicing manufacturing engineers by applying established and research laboratory manufacturing techniques to a wide variety of materials. Engineers seeking more knowledge of how nano and micro devices are designed and fabricated will learn: Manufacturing and fabrication at the micro and nanoscales Using bulk and surface micromachining techniques, LiGA and deep x-ray lithography to manufacture semiconductors Producing master molds with micromachining The deposition of thin films, pulsed water drop machining, and nanomachining Mark J. Jackson is an Associate Professor in the Department of Mechanical Engineering Technology at Purdue University. His current research focuses on understanding the properties of materials in the field of micro scale metal cutting, micro and nano abrasive machining, and laser micro machining | ||
| 650 | |a Micro-fabrication | ||
| 650 | |a Nanotechnologie | ||
| 776 | 0 | |0 11464456X |t Micro and nanomanufacturing |f Mark J. Jackson |c New York |n Springer |d 2007 |p 1 vol. (X-699 p.) |z 978-0-387-25874-4 | |
| 856 | 4 | |q PDF |u https://doi.org/10.1007/b136902 |z Accès sur la plateforme de l'éditeur | |
| 856 | 4 | |u https://revue-sommaire.istex.fr/ark:/67375/8Q1-W07147TR-K |z Accès sur la plateforme Istex | |
| 856 | 4 | |5 452349901:747890439 |u https://ezproxy.univ-orleans.fr/login?url=https://doi.org/10.1007/b136902 |z Accès Université d'Orléans | |
| 856 | 4 | |5 180339901:750903597 |u https://ezproxy.insa-cvl.fr/login?qurl=https://doi.org/10.1007/b136902 |z Accès INSA CVL | |
| 997 | |0 937672 |1 Livre numérique |a Ressource numérique |b INSA |b ENSA |c 0/Bibliothèque numérique/ |c 1/Bibliothèque numérique/Autre ressource numérique/ | ||