Introductory MEMS : Fabrication and Applications
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on ME...
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| Main Authors: | , |
|---|---|
| Format: | Livre numérique |
| Language: | Anglais |
| Published: |
New York, NY :
Springer US
2010.
Cham : Springer Nature |
| Online Access: | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex Accès Université d'Orléans Accès INSA CVL |
| Note: |
Archives Springer e-books (Licence nationale) Archives Springer e-books (Licence nationale) |
| Autres localisations: | Voir dans le Sudoc |
| Edition sous un autre format: | • Introductory MEMS, Texte imprimé, 9780387560588 • Introductory MEMS, Texte imprimé, 9781489984210 |
Table of Contents:
- Fabrication
- The substrate and adding material to it
- Creating and transferring patterns#x2014;Photolithography
- Creating structures#x2014;Micromachining
- Solid mechanics
- Applications
- Thinking about modeling
- MEMS transducers#x2014;An overview of how they work
- Piezoresistive transducers
- Capacitive transducers
- Piezoelectric transducers
- Thermal transducers
- to microfluidics
- Laboratories
- Microfabrication laboratories.